Tag: 3D MEMS

MIT breakthrough technology could mean new generation of 3D motion sensors

Researchers at MIT have achieved a major breakthrough in Microelectromechanical Systems (MEMS) technology which will allow for the fabrication of three dimensional microchips using existing fabrication techniques. The silicon device contains microscopic elements about the width of a red blood cell which can be engineered to reach heights of hundreds of microns above the chip’s […]